電子設(shè)備產(chǎn)品說明書部分翻譯
1．被鍍工件必須清洗干凈，清洗前請(qǐng)閱讀《工藝前處理說明書》。
2．將工件仔細(xì)裝卡在工件架上，調(diào)節(jié)轉(zhuǎn)架按鈕，檢查工件在轉(zhuǎn)動(dòng)過程中是否有相互碰撞，遮擋或裝卡不牢等現(xiàn)象。
3． 確認(rèn)正常無誤后關(guān)好門，按抽空操作程序進(jìn)行真空操作，將鍍膜室真空 抽至7*10-3Pa。
注意：開始操作前必須檢查各部分冷卻水是否暢通
4． 接通加熱電源，也可根據(jù)不同的工藝要求提前加熱。
5．排氣及加熱完畢后，按下V4按鈕，關(guān)閉節(jié)流閥，打開質(zhì)量流量計(jì)電源開關(guān)，接通Ar氣路，調(diào)節(jié)旋鈕加大Ar流量直至真空度為2-2.6Pa左右。
6．氬離子轟擊清洗：按下轟偏及加熱控制板上電源開關(guān)，接通轟偏電源，此時(shí)轟偏電源電壓處于零位。旋轉(zhuǎn)轟偏電壓電位器旋鈕，逐漸提高輸出電壓，其數(shù)值由轟偏電壓表讀出。隨著電壓的提高，透過觀察窗可以看到鍍膜室有輝光放電現(xiàn)象。轟偏電壓表指針擺動(dòng)（說明工件表面有毛刺或臟物存在），此時(shí)應(yīng)暫停增加電壓，直到表針穩(wěn)定時(shí)，再繼續(xù)提高電壓，轟擊電壓一般為800V左右，若無打火現(xiàn)象，則在該電壓下保持2-3min后，將電壓降回零。
7．關(guān)斷Ar氣，旋轉(zhuǎn)質(zhì)量流量計(jì)控制板上的電位器旋鈕至零位。置選擇開關(guān)CLOSE關(guān)閉位置，關(guān)閉電源開關(guān)。
8．恢復(fù)高真空。開節(jié)流閥抽至（1-2）*10-2Pa-7*10-3Pa時(shí)再關(guān)節(jié)流閥。
9．接通高純N2。按下質(zhì)量流量計(jì)控制板上N2的電源開關(guān)，接通電源，將流量計(jì)選擇開關(guān)置VALVE狀態(tài)，旋轉(zhuǎn)電位器旋鈕，增大N2的流量，這時(shí)數(shù)字表顯示為N2流量值。Ar的流量由工藝規(guī)程決定。同時(shí)觀察真空計(jì)控制板上的真空達(dá)到工藝要求（4-8）*10-2Pa值為止。
10．接通轟偏電壓調(diào)至工藝要求值。按下轟偏及加熱源控制板上電源開關(guān)，旋轉(zhuǎn)電位器旋鈕，此時(shí)轟偏電壓逐步提高至工藝要求值。
1) Workpieces must be cleaned. Prior to cleaning, please read the instruction of preprocessing carefully.
2) Mount the workpieces on the turntable, rotate the turntable button, and check whether there is blocking, crash or loose during the rotation.
3) Close the door aftyer making sure that it is normal, and conduct vacuum operation according to the exhaust procedure until the vacuum degree is 7*10-3Pa.
Notes: It is necessary to check whether the cooling water route of all parts is smoothing prior to the operation.
4) Connect to heating power supply or preheat according to the different processes.
5) After exhausting and heating, press the button V4 to close throttle valve, turn on power supply of mass flow meter to connect to Ar passage, and adjust the knob to increase the Ar flow rate until the vacuum degree reaches 2-2.6Pa.
6) Argon ion bombardment cleaning：Press the switch of power supply on bias bombardment and heating control panel to connect to bias & bombardment power supply just when the voltage of bias & bombardment power supply is at zero. Turn the knob of voltage potentiometer of bias bombardment power supply to increase output voltage, whose value could be read through volt gauge. With the growth of voltage, the cold-cathode discharge could be observed in the plating chamber through the observing view port, indicating there are some burrs or dirties on the surface of work piece. Therefore, it should stop increasing voltage. After the needle of voltage reaches stability, it could continue to increase voltage. Generally, the bombardment voltage is around 800V. If there is no fire fighting, the voltage should be reduced to zero after the voltage is no changed for 2-3 min.
7) Cut the Ar gas, turn the knob of potentiometer on the mass flow meter to the zero. Put the selector button to close position and close the power supply.
8) Recover the high-vacuum. Open flow regulating valve before the vacuum degree reaches （1-2）*10-2Pa-7*10-3Pa.
9) Connect the high and pure N2. Connect the power supply of N2 on the control panel of mass flow meter. Put the switch at the position of VALVE, turn the knob of potentiometer to increase the flow of N2. At this time, the flow value of N2 will be showed in the numeral indicator. The flow rate of Ar is depend on the process specification. Meantime, observe the vacuum value in the vacuum meter before it reaches （4-8）*10-2Pa.
10) Connect the bombardment grid bias voltage, and adjust it to the requirement of process. Connect the power supply of bombardment grid bias and heating, turn the knob of potentiometer. At this time, the bombardment grid bias voltage should be gradually increased to the requirement of process.
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